Author Affiliations
Abstract
1 Department of Optics and Optical Engineering, University of Science and Technology of China, Hefei 230026, China
2 Advanced Laser Technology Laboratory of Anhui Province, Hefei 230026, China
The compact, sensitive, and multidimensional displacement measurement device plays a crucial role in semiconductor manufacture and high-resolution optical imaging. The metasurface offers a promising solution to develop high-precision displacement metrology. In this work, we proposed and experimentally demonstrated a two-dimensional displacement (XZ) measurement device by a dielectric metasurface. Both transversal and longitudinal displacements of the metasurface can be obtained by the analysis of the interference optical intensity that is generated by the deflected light beams while the metasurface is under linearly polarized incidence. We experimentally demonstrated that displacements down to 5.4 nm along the x-axis and 0.12 µm along the z-axis can be resolved with a 900 µm × 900 µm metasurface. Our work opens up new possibilities to develop a compact high-precision multidimensional displacement sensor.
metasurface transversal and longitudinal displacement measurement 
Chinese Optics Letters
2024, 22(2): 021202
蔡梦雪 1,2,3,4王孝坤 1,2,3,4张志宇 1,2,3,4李凌众 1,2,3,4[ ... ]张学军 1,2,3,4
作者单位
摘要
1 中国科学院长春光学精密机械与物理研究所,吉林 长春 130033
2 中国科学院大学,北京 100049
3 应用光学国家重点实验室,吉林 长春 130033
4 中国科学院光学系统先进制造技术重点实验室,吉林 长春 130033
由于仪器传递函数(Instrument Transfer Function, ITF)能准确反映仪器在空间频率上的响应特征,被广泛应用于仪器规范之中。目前多采用刻有单一台阶特征或不同周期正弦特征的平面测试板对干涉仪的ITF进行检测。针对平面测试板无法完成高陡度球面/非球面镜检测时ITF标定的问题,提出了根据球面台阶测试板标定高陡度镜面检测的子孔径拼接ITF的方法。通过超精密车削技术制作了球面台阶测试板,并对其进行拼接检测,根据梯度定位法和旋转矩阵完成检测孔径中台阶的定位及采样,利用傅里叶变换方法实现对台阶实测面形的功率谱密度求解,最后与理想面形功率谱密度做比获得ITF。对口径100 mm、曲率半径100 mm、带有同心圆环台阶结构的球面台阶测试板进行拼接检测以及数据分析,实验结果表明:在1 mm−1的空间频率范围内,各个子孔径对高陡度镜面的检测水平平均可达到82.72%,具有较好的检测精度,随后ITF逐渐衰减,当空间频率在1.5 mm−1左右时,仅能达到40%~60%。
高陡度球面 高陡度非球面 仪器传递函数 子孔径拼接 球面台阶测试板 high-steep spherical surface high-steep aspheric surface instrument transfer function sub-aperture stitching spherical step test board 
红外与激光工程
2023, 52(9): 20230462
作者单位
摘要
电子科技大学材料与能源学院,成都 611731
全无机卤化双钙钛矿是一类具备优异光电特性和稳定性的环境友好型非铅材料。因其在太阳能电池、光电探测器和发光二极管中具有巨大的应用潜力,受到国内外研究人员的青睐。本综述主要围绕全无机卤化双钙钛矿的结构特点和光电特性展开研究,重点对全无机卤化双钙钛矿的制备方法和应用方向进行归纳。最后,进一步总结了全无机卤化双钙钛矿材料目前的科学瓶颈及解决方案,期望对全无机卤化双钙钛矿的材料性能提升和光电器件应用提供有价值的参考。
全无机卤化双钙钛矿 光电性质 制备工艺 光电器件 All-inorganic halide double perovskites photoelectrical properties preparation process optoelectronic devices 
硅酸盐学报
2023, 51(9): 2271
作者单位
摘要
1 西安邮电大学 电子工程学院,西安 710121
2 安徽科技学院 电气与电子工程学院,安徽 蚌埠 340303
贵金属纳米颗粒由于具有独特的物理特性而被广泛应用于催化,光热治疗及表面增强光谱等领域,然而银纳米颗粒的化学稳定性差,金纳米颗粒的催化性能依赖其大小,这严重限制了其进一步应用。本文通过一种简单温和的湿化学方法合成了具有较好单分散性的球形金银合金纳米颗粒。根据表征结果可知,合金颗粒的形貌尺寸均一,金和银两种金属元素分布均匀,属于一种多晶的晶体结构。研究结果表明,通过改变金和银的摩尔比,能够很容易实现金银合金纳米颗粒表面等离激元共振峰的调控。此外,由于金和银两种元素的协同效应,金银合金纳米颗粒同时具有较好的稳定性和较强的催化性能,且要远好于单组分的金纳米颗粒和银纳米颗粒。该研究为构建多种较高性能的合金纳米材料提供了新思路,为减少环境中芳香族硝基有机污染物提供了可能途径。
金银合金 纳米颗粒 表面等离激元 吸收光谱 催化性能 AuAg alloy Nanoparticles Surface plasmon Absorption spectrum Catalytic activity 
光子学报
2022, 51(10): 1016003
Author Affiliations
Abstract
Research Center of Laser Fusion, China Academy of Engineering Physics, P.O. Box 919-986, Mianyang 621900, China
A practical experimental method is proposed to investigate thermal transport by characterizing the motion of plasma flows through a x-ray spectroscopic technique using tracers. By simultaneously measuring multiple parameters, namely, the mass-ablation rate, the temporal evolution of plasma flow velocities and trajectories and the temperature, it is possible to observe a variety of physical processes, such as shock wave compression, heating by thermal waves, and plasma thermal expansion, and to determine their relative importance in different phases during the irradiation of CH and Au targets. From a comparison with hydrodynamic simulations, we find significant differences in the motion of the plasma flows between CH and Au, which can be attributed to different sensitivities to the thermal transport process. There are also differences in the ablation and electron temperature histories of the two materials. These results confirm that velocities and trajectories of plasma motion can provide useful evidence in the investigation of thermal conduction, and the approach presented here deserves more attention in the context of inertial confinement fusion and high-energy-density physics.
Matter and Radiation at Extremes
2022, 7(4): 045902
作者单位
摘要
1 中国科学院长春光学精密机械与物理研究所, 吉林 长春 130033
2 中国科学院大学, 北京 100049
单晶硅是一种重要的半导体材料。通常,铸锭切片后的单晶硅表面易产生较深的沟槽、凹坑和裂纹等缺陷。针对这一问题,提出了一种双步激光辐射的方法,其在修复表面缺陷的同时,可以降低表面粗糙度。首先,通过有限元法模拟对不同激光参数下可修复的缺陷深度进行预测。然后,在0.50 J/cm 2的较高能量密度下,利用较深的表面层熔化修复各种深度的表面缺陷。然而,由于高能量密度下引发的热毛细管流易造成高频特征残留在表面上,故会导致表面粗糙度增加。接着,使用一个0.20 J/cm 2的低能量密度再次辐射同一表面,可有效消除残留的高频特征。最终,原始表面粗糙度为1.057 μm的表面经过双步激光辐射后可获得一个表面粗糙度为26 nm的无缺陷光滑表面。
激光光学 单晶硅表面缺陷 纳秒激光辐射 有限元模拟 毛细管流动 表面张力 
光学学报
2022, 42(7): 0714004
Author Affiliations
Abstract
1 Department of Optics and Optical Engineering, University of Science and Technology of China, Hefei 230026, China
2 USTC Center for Micro and Nanoscale Research and Fabrication, University of Science and Technology of China, Hefei 230026, China
3 Advanced Laser Technology Laboratory of Anhui Province, Hefei 230026, China
Phase carried by two orthogonal polarizations can be manipulated independently by controlling both the geometric size and orientation of the dielectric nanopost. With this characteristic, we demonstrate a novel multifunctional metasurface, which converts part of the incident linearly polarized light into its cross-polarization and encodes the phase of the two orthogonal polarizations independently. A beam splitter and a bifocal metalens were realized in a single-layer dielectric metasurface by this approach. We fabricated the bifocal metalens and demonstrated that two focal spots in orthogonal polarizations can be separated transversely or longitudinally at will. The proposed approach shows a new route to design multifunctional metasurfaces with various applications in holography and three-dimensional display.
multifunctional metasurface polarization conversion beam splitting bifocal metalens 
Chinese Optics Letters
2021, 19(5): 053601
作者单位
摘要
武汉大学电子信息学院, 湖北 武汉 430072
为了获取高精度的月面高程,需要对激光器的指向误差进行准确估计。月球轨道激光高度计(LOLA)在轨工作期间,由于月球昼夜温度相差较大,夜晚的激光指向相对白天存在很大偏移。首先建立光斑偏离接收视场中心时探测器接收能量的理论模型,并基于该模型分析光斑偏移量与相对接收能量的理论关系,进而提出一种基于光斑能量的激光指向误差的估算方法。随后,使用测绘轨道期间(12个月)LOLA经过Aestuum地区产生的能量数据,并将能量数据与估算方法相结合,估算出LOLA在月球夜晚时的激光指向误差在沿轨方向为140.62 μrad,在垂轨方向为-413.17 μrad,该结果与LOLA地球扫描实验和利用轨道交叉点处高程数据推导的结果基本一致。
遥感 月球轨道激光高度计 在轨标定 激光指向误差 能量数据 
光学学报
2020, 40(5): 0528001
Author Affiliations
Abstract
National Key Laboratory of Photoelectric Technology and Functional Materials (Culture Base) in Shaanxi Province, National Photoelectric Technology and Functional Materials & Application of Science and Technology International Cooperation Base, Institute of Photonics & Photon-Technology, Northwest University, Xi’an 710069, China
A multifunctional photo-thermal therapeutic nano-platform Y2O3: Nd3+/Yb3+/Er3+@SiO2@Cu2S (YR-Si-Cu2S) was designed through a core–shell structure, expressing the function of bio-tissue imaging, real-time temperature detection, and photo-thermal therapy under 808 nm light excitation. In this system, the core Y2O3: Nd3+/Yb3+/Er3+ (YR) takes the responsibility of emitting optical information and monitoring temperature, while the shell Cu2S nano-particles carry most of the photo-thermal conversion function. The temperature sensing characteristic was achieved by the fluorescence intensity ratio using the thermally coupled energy levels (TCLs) S3/24/H211/2 of Er3+, and its higher accuracy for real-time temperature measurement in the bio-tissue than that of an infrared thermal camera was also proved by sub-tissue experiments. Furthermore, the photo-thermal effect of the present nano-system Y2O3: Nd3+/Yb3+/Er3+@SiO2@Cu2S was confirmed by Escherichia coli (E. coli) and Staphylococcus aureus (S. aureus) ablation. Results indicate that YR-Si-Cu2S has application prospect in temperature-controlled photo-thermal treatment and imaging in bio-tissues.
Photonics Research
2020, 8(1): 01000032
Author Affiliations
Abstract
1 Key Laboratory of Optical System Advanced Manufacturing Technology, Changchun Institute of Optics,Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun 130033, People’s Republic of China
2 Department of Mechanical Engineering, Keio University, Yokohama 223-8522, Japan
3 Department of Mechanical Systems Engineering, Tohoku University, Sendai 980-8575, Japan
Precision is one of the most important aspects of manufacturing. High precision creates high quality, high performance, exchangeability, reliability, and added value for industrial products. Over the past decades, remarkable advances have been achieved in the area of high-precision manufacturing technologies, where the form accuracy approaches the nanometer level and surface roughness the atomic level. These extremely high precision manufacturing technologies enable the development of high-performance optical elements, semiconductor substrates, biomedical parts, and so on, thereby enhancing the ability of human beings to explore the macroand microscopic mysteries and potentialities of the natural world. In this paper, state-of-the-art high-precision material removal manufacturing technologies, especially ultraprecision cutting, grinding, deterministic form correction polishing, and supersmooth polishing, are reviewed and compared with insights into their principles, methodologies, and applications. The key issues in extreme precision manufacturing that should be considered for future R&D are discussed.
ultraprecision cutting grinding polishing supersmooth surface ultraprecision measurement extreme precision 
International Journal of Extreme Manufacturing
2019, 1(2): 022001

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